In-Situ Roughness Monitoring of very rough surfaces such as those of diffusers for LED and Laser light sources, as well as silicon and compound semiconductor solar cells.
The FSM RMS In-Situ Roughness Monitoring System is a compact, robust, and easy to use system to measure the roughness of very rough surfaces such as those of diffusers for LED and Laser light sources, as well as silicon and compound semiconductor solar cells. FSM’s proprietary non-contact grazing angle scattering technology makes the system immune to stray light and vibration and easy to integrate.
FSM will be introducing the new FSM 8108 VITE system at the FCMN 2017 in Monterey. FSM 8108 VITE is based on the Frequency Space Moire Effect, which provides high speed, high accuracy dimensional metrology.
FSM will exhibit and present at 2017 MRS Spring Meeting. Booth number 504. Please visit.
FSM will exhibit and present at FCMN 2017. We will be introducing our latest metrology solutions for thinned wafer thickness measurement and other application. Talk to us also about our new high temperature vacuum characterization chamber with wafer rotation.