Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in inert gas. Non-Contact Laser Scanning Technology.
Evaluate the thermal properties and stability (film stress) of thin films up to 500 degree C in inert gas. 200mm or 300mm chamber. Manually loading.
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Jul 09, 2019FSM will be presenting at SPIE Photonics West in San Francisco, Ca, February 2 -7, 2019.
Feb 02, 2019