Electrical Characterization
Contact and Non-Contact sheet resistance measurement systems for implantation, diffusion, metallization, and many other applications.
4pp
4-Point Probe Technique for measuring the sheet resistance of epi, metal films, substrates. Table top and fully automated cassette to cassette systems available.
RsL
Non-contact sheet resistance and leakage measurement of ultra shallow junctions (UJS). Measurement on production wafers. Semi-automated and fully automated cassette to cassette systems available.
