A Michelson Interferometer with a low coherence light source is used to determine distances: L2 is the beam path length from the light source LS to a surface or interface on the wafer w and back to the detector D. L1 is the beam path from LS to the reference mirror and back to D. If L1 = L2 interference is observed.
FSM will be introducing the new FSM 8108 VITE system at the FCMN 2017 in Monterey. FSM 8108 VITE is based on the Frequency Space Moire Effect, which provides high speed, high accuracy dimensional metrology.
FSM will exhibit and present at 2017 MRS Spring Meeting. Booth number 504. Please visit.
FSM will exhibit and present at FCMN 2017. We will be introducing our latest metrology solutions for thinned wafer thickness measurement and other application. Talk to us also about our new high temperature vacuum characterization chamber with wafer rotation.